The Micromachinist's Toolbox


Eric Peeters
Xerox

ABSTRACT:

'Micromachining' technology, an extension of conventional semiconductor processing methods, allows for massively parallel fabrication of micro-mechanical components on a chip. Interaction between integrated electronics and mechanics has enabled the implementation of Micro Electro Mechanical Systems (MEMS)on a chip, with applications varying as widely as mechanical sensors, micro-optics and micro-fluidic handling systems, to name a few. In the forum, we will have a peek inside the "Micromachinist's toolbox" to understand how these MEMS components are fabricated and, from there, explore their possibilities and the limitations, and extrapolate where the most suited application areas are. This generic Micromachining/MEMS tutorial is illustrated with a variety of real-world case studies.

BIOGRAPHY:

Eric Peeters is member of the Electronic Materials Laboratory (EML) at Xerox PARC. Formerly, he was member of the Smart Electronic Marking & Sensing Lab (SEMS) and the Exploratory Studies Lab (ESL), both at the Xerox Wilson Center in Webster, NY. He received the PhD. in Electrical Engineering from the University of Leuven, Belgium, for work on "Process Development of 3D Silicon Microstructures with Application to Mechanical Sensing Devices". He authored or co-authored 40 publications related to micromachining technology, electromechanical design of MEMS, device fabrication, CAD for MEMS, sensor interfacing and communication, and biomedical application of silicon microsensors.